The confocal scanning laser microscope "LEXT OLS3000" has accomplished unprecedented high-resolution observations and high repeatability performance. It also enables brightfield, darkfield and differential interference contrast (DIC) white light observations – a function introduced to this type of microscope for the first time in the world.

SPECIAL of Laser Microscope


Highly reliable observations and measurements


High speeds


Basic performance of the microscope


Reliable hardware

  • High-resolution image observation:
    Capability of observing line/space patterns of 0.12µm
  • Planar measurement:
    High-accuracy planar(XY) measurement with repeatability of less than 3s(n-1)=0.02µm
  • Bump measurement:
    High-accuracy bump measurement with repeatability of less than 3s(n-1)=0.05+0.002Lµm
  • Roughness measurement:
    Noncontact roughness measurement with the level of Rmax=0.1µm
  • Film thickness measurement:
    Measurement of the thickness of transparent films of 1mm to 1µm in thickness

Typical applications

Electronic components FPD Semiconductors
  • Ceramic capacitor
  • Printed circuit board
  • TAB tape
  • Magnetic head
  • TFT liquid crystal array
  • Lead frame
  • PDP
  • OLED
  • Optical waveguide
  • Spacer beads
  • Light distribution film
  • Bare silicon wafer
  • Bare compound wafer
  • Pattern line width
Automobiles Mounting Microcomponents
  • Brake disk
  • Gear sliding surface
  • Radiator
  • Oil seal mold
  • Pressure sensor
  • Cooling fan
  • MEMS
  • Microlens
  • Microchip
  • Diffraction grid
  • SAW filter
Materials Chemistry Others
  • Metal surface
  • Ceramics
  • Paper
  • Corrosion
  • Skin
  • Hair
  • Bite cutting edge
  • Whetstone
  • Remains
  • Food