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SPECIFICATIONS of Laser Microscope
| Main stand and stage | Configuration | Dedicated stand and stage | ||||
| Outside dimensions | 464 x 559 x 614.5 (mm) *Not including the vibration-isolating stand |
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| Weight | 56.9kg | |||||
| Maximum height of specimen | 100 mm | |||||
| Load capacity | 10 kg | |||||
| XY stage | Manual: | 100~10(mm) | ||||
| Electric: | 150~100(mm) | |||||
| A specimen of 300×300 mm in size can be handled on an additional stage. |
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| Nosepiece | 5-position BD objective type | |||||
| Objectives | Magnification | 5x | 10x | 20x | 50x | 100x |
| Working distance: mm | 20.0 | 10.1 | 3.1 | 0.33 | 0.35 | |
| Numerical aperture | 0.15 | 0.3 | 0.46 | 0.95 | 0.95 | |
| Observation and measurement range | Horizontal (H): µm | 2,560 | 1,280 | 640 | 256 | 128 |
| Vertical (V): µm | 2,560 | 1,280 | 640 | 256 | 128 | |
| Magnification on monitor | 100- 600 |
200- 1200 |
400- 2400 |
1000- 6000 |
2000- 12000 |
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| Optical zoom | 1x – 6x | |||||
| Confocal method | Pinhole | |||||
| Photo detector | Photo multiplier | |||||
| Measurement laser | Light source | Purple semiconductor laser | ||||
| Wavelength/output | 408 nm/0.9 mW (JIS Class 2) | |||||
| Image import method | CFO search Step search |
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| Image import mode | Contrast Mode Enhance Mode |
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| Planar (XY) display resolution | 1024×1024 (pixel) | |||||
| Frame memory | Brightness | 1024x1024x12bit | ||||
| Height | 1024x1024x16bit | |||||
| Frame rate | 12Hz | |||||
| Planar (XY) measurement | Minimum resolution | 0.12µm Resolution=Nxl/N.A. N: Constant, l: Wavelength, N.A.: Numerical aperture |
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| Measurement repeatability | 3s(n-1)=0.03 *No limitation on object line width |
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| Height (Z) measurement | Measurement range | 10mm | ||||
| Minimum movement resolution | 0.01µm | |||||
| Minimum display resolution | 0.001µm | |||||
| Height scale | Open control by linear scale | |||||
| Measurement repeatability: µm | 3s(n-1)=0.05+0.002L -> 2 mm at measurement: 3s=0.054 *Guaranteed using a full stroke |
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| Main unit control | Using a controller PC | |||||
| Auto focus Auto gain Band scan |
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| Image processing, 2D image processing, and 3D image processing |
Using a controller PC | |||||
| Width measurement -> to be measured automatically Bump measurement Surface area measurement Volume measurement Line roughness measurement Surface roughness measurement Report function 2-channel display |
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