High accuracy, high stability and high performance.
Microfigure, steps and roughness measurement for FPD, silicon wafer, hard-disk etc.
Specifications
| Minimum readout0.1µm | ET400M | ET4000A | ET4000L | |
|---|---|---|---|---|
| Max. sample size | 300x300mm | 210x210mm | 300x400mm | |
| Sample stage | size | 320x320mm | 220x220mm | 540x400mm |
| Tilting Range X | ±1mm/150mm()Motorized) | |||
| Tilting Range Y | – | ±1mm/150mm()Motorized) | ||
| Capability | 2kg | |||
| Pickup | Force | 0.5uN~500uN(0.05mgf~50mgf)(Adjustable) | ||
| Range | 100um | |||
| Sensor | LVDT(Direct Motion) | |||
| Stylus | ET-1479(R2um) | ET-1479(R2um),ET-1480(R0.5um) | ||
| X Axis | Range | 100mm | ||
| Straightness | 0.005um/5mm(0.1um/100mm) | |||
| Speed | 0.005-2mm/s(at positioning 10mm/s) | |||
| Repeatability | ±5um(Positioning) | |||
| Y Axis | Range | – | 150mm(stage) | 400mm(stage) |
| Straightness | – | 5um/150mm | ||
| Repeatability | – | ±5um(Positioning) | ||
| Z Axis | Range | 52mm | ||
| Magnification | Vertical | 50~2000000 | ||
| Horizontal | 1~10000 | |||
| 3D Measurement | – | Available(Option) | ||
| θ Axis | – | Available(Option) | ||
| Assist function | Teaching (Positioning), Motorized Tiliting, Pitch Analysis, Pickup auto stop, Measurment/Analysis macro, Customized print layout, Statisitics |
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| Monitoring system | Camera | 1/2inch CCD (768×494 pixels) | ||
| Monitor | Video Capture Board | |||
| Analysus items | Microfigure, Step, Roughness, Waviness, Pich |
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| Repeatability | 1σ0.5nm | |||
| Utility | AC100V 800VA | |||
| Size | W660xD580xH660mm 200kg | |||
| Combinations | ||||
| Main Body | ETB-40M | ETB-40A | ETB-40L | |
| Pickup | PU-EA2 | |||
| Stylus | ET-1479(R2um) | ET-1479 (R2um), ET-1480 (R0.5um) | ||
| Analysis secion | Controller | AS-3502C+AT4001P | ||
| Analysis | PC:IBM Compatible Windows | |||
| Monitor:17inch CRT | ||||
| Printer:Color ink-jet printer (A4) | ||||
| Remote Controller | RC-83 | RC-85 (joy stick) | ||
| Monitoring system | PSM-3, ETM-1 (Color CCD Camera with Video Capture Board) |
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| Calibration speciment | SS-T | |||