NEXIV VMR-H3030 Z120X


Ultrahigh-Precision Type With
Maximum Magnificaion Model

With an ultrahigh-precision stage and maximum magnification module, it measures fine workpieces with ultrahigh accuracy
(e.g., critical dimensions on patterned masks and bump heights)

Applications

Wafer level CSP
Wafer level bump heights
Wafer level SIP
Rerouted masks
Masks for MEMS

  • 120X optical magnification enables measurements of rerouted patterns on wafer level CSP
  • High precision stage facilitates accurate measurements even for wider dimensions
  • Enables measurements of top and bottom widths of etched lines, respectively
  • Laser AF facilitates measurements of minuscule bump heights
  • Enables evaluation of cross-sectional shapes of bumps and solder balls

Specifications

Stroke (XxYxZ) With high magnification
lens
300 x 300x 150 mm (11.8 x 11.8 x 5.9 in.)
With low magnification
lens
250 x 300x 150 mm (9.8 x 11.8 x 5.9 in.)
Minimum readout 0.01µm
Maximum workpiece
weight
30kg (66.1 lb)
Measuring
accuracy
U1X, U1Y 0.6 + 2L/1000µm (with a workpiece max. 10kg)
U2XY 0.9 + 3L/1000µm (with a workpiece max. 10kg)
Z-axis (L:
Length in mm < W.D.)
0.9 + L/150µm
Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance High mag. objective lens: 9.8mm
Low mag. objective lens: 32mm
Magnification
vs field of view
High mag. objective lens: 9.8mm
Low mag. objective lens: 32mm
Auto focus TTL Laser AF and Vision AF
Illumination Episcopic, diascopic
(with high mag. head only), darkfield illumination
Power source AC100-240V±10%, 50/60Hz
Power consumption Max. 13A
Dimensions & weight Main unit only 915 x 1060 x 1300 mm,
approx. 450kg
(36.0 x 41.7 x 51.2 in., 992.1 lb.)
Main unit & table 1000 x 1100 x 1900 mm,
approx. 570kg
(39.4 x 43.3 x 74.8 in., 1256.6 lb.)
Controller 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint 2400 (W) x 1400 (D) mm (94.5 x 55.1 in.)
Host Computer
Main unit IBM PC/AT (Windows®2000)
Monitor 17-in. TFT color

Standard Type Ultrahigh-Precision Type Large Stroke Type Ultra-large Stroke Type
NEXIV VMR-3020
NEXIV VMR-3020 Z120X
NEXIV VMR-H3030
NEXIV VMR-H3030 Z120X
NEXIV VMR-6555
NEXIV VMR-6555 Z120X
NEXIV VMR-10080
NEXIV VMR-10080 Z120X