Standard Type With
Maximum Magnification Module
Its maximum magnification module achieves mcasurements of fine workpicces. Perfect for measurements of topical MEMS parts, high-density PCBs and semiconductor packages.
Applications
High-density PCBs
Exposure masks for substrates
Packages (2D + height)
MEMS parts
- Maximum magnification module and high-precision stage enable accurate
- measurements of large geometry workpieces and minute shapes
- Laser AF with minute laser spots provides accurate measurements of small cross-sectional shapes
- Optional surface analysis software displays 3D shapes of MEMS parts
Specifications
| Stroke (XxYxZ) | With high magnification lens |
300 x 200x 150 mm (11.8 x 7.9 x 5.9 in.) |
| With low magnification lens |
250 x 200x 150 mm (9.8 x 7.9 x 5.9 in.) | |
| Minimum readout | 0.1µm | |
| Maximum workpiece weight |
20kg (44.0 lb) | |
| Measuring accuracy |
U1X, U1Y | 1.5 + 4L/1000µm (with a workpiece max. 5kg) |
| U2XY | 2.5 + 4L/1000µm (with a workpiece max. 5kg) | |
| Z-axis (L: Length in mm < W.D.) |
1.5 + L/150µm | |
| Camera | B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD | |
| Working distance@ | High mag. objective lens: 9.8mm Low mag. objective lens: 32mm |
|
| Magnification vs field of view |
1 – 120X / 4.67 x 3.5 – 0.039 x 0.029 mm | |
| Auto focus | TTL Laser AF and Vision AF | |
| Illumination | Episcopic, diascopic (with high mag. head only), darkfield illumination | |
| Power source | AC100-240V±10%, 50/60Hz | |
| Power consumption | Max. 13A | |
| Dimensions & weight | Main unit only | 625 x 728 x 1195 mm, approx. 200kg (24.6 x 28.7 x 47.0 in., 441.0 lb.) |
| Main unit & table | 690 x 730 x 1725 mm, approx. 240kg (27.2 x 28.7 x 67.9 in., 529.1 lb.) |
|
| Controller | 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.) | |
| Footprint | 2100 (W) x 1100 (D) mm (82.7 x 43.3 in.) | |
| Host Computer | ||
|---|---|---|
| Main unit | IBM PC/AT (Windows®2000) | |
| Monitor | 17-in. TFT color | |
| Standard Type | Ultrahigh-Precision Type | Large Stroke Type | Ultra-large Stroke Type |
|---|---|---|---|
|
NEXIV VMR-3020 NEXIV VMR-3020 Z120X |
NEXIV VMR-H3030 NEXIV VMR-H3030 Z120X |
NEXIV VMR-6555 NEXIV VMR-6555 Z120X |
NEXIV VMR-10080 NEXIV VMR-10080 Z120X |