LEXT HARDWARE

LEXTトップへ LEXT原理 LEXT仕様

HARDWARE


Moving the head rather than the stage leads to more reliable course focus.

  • By moving the observation tube, not the stage, up and down for coarse adjustment, high repeatability performance can be achieved without being affected
    by vibrations.
  • A specimen of up to 100 mm in height can be handled with no modifications made to this microscope.


High-reliability components are incorporated in the stage.

  • A highly reliable ball race is used as an XY
    guide rail.
  • The XY perpendicularity is very high.
  • The coarse/fine adjustment axis enables fine alignment.
  • The low gravity-point structure prevents vibrations from
    occurring.