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Type Manual measurement Automatic measurement Semi-automatic measurement Fully automatic measurement

WF-R55Z

WF-R55Z + wafer loader

WF-R55 (Microscope type)

WF-R55 (Microscope type) + wafer loader

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WF-R55 (Portal type)

WF-R55 (Portal type) + robot

WF-R55UVZ

WF-R55Z + wafer loader

WF-R55UVZ

WF-R55UVZ + robot

WF-R150J series
 
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WF-R55Z

Features
Microscope + manual stage
Operator moves the stage and manually positions it for measurement
When combined with the wafer loader, high throughput measurement is possible
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WF-R55

Features
Comes with electric stage for automatic measurement
By installing the transfer robot, high throughput, fully automatic measurement is possible
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WF-R55UV

Features
The edge is made more visible and higher precision measurements are made possible by employing a short wave length light source (i-line: 365nm).
Fully automatic measurement is made possible through the addition of a transfer system.
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Robot

Features
On 2-8 inch wafers, fully automatic cassette to cassette measurement is possible.
The robot can be controlled from your PC.
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WF-R150J Series

Features
Equipped with electric stage which can handle large glass plates
Short-dimension, long-dimension, imposition precision measurements are possible
High-speed, high-precision measurements through the use of Laser Auto Focus and Image Auto Focus
Measurement reproducibility (when using laser interferometer)
Short-dimension measurement 3σ : 0.03μm or less
Long-dimension measurement 3σ : 0.3μm or less
Custom specifications such as reflecting/transmission measurement and transfer system (MGV/AGV) compatibility

 
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