 Top
Z resolution in the series at 1 nm!
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 MITAKA
/ RYOKOSHA |
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The
popular NH Series was upgraded to realize ultra-precision
with Z resolution of 0.001µm and X,Y resolution
of 0.02µm.
Measurements can be performed without contact and
without being affected by the samplefs color, reflectivity,
angle or other surface conditions. This 3D measurement
equipment has a wide measurement area and provides
precision sub-micron measurements.
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Features |
Main features of the
NH-3SP with unparalleled high-precision height
measurements and multi-functionality include: |
- Absolute accuracy=±0.3µm
- Does not depend on reflectivity
- Completely nondestructive
measurement (non-contact)
- Wide range of measurement
- Automatic measurement
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and more. It has many possible uses including
measurement of height of elements from previous
processes, HDD related and aspherical lens
measurement.
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Specifications / Measuring Functions |
Specifications
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| Minimum
height resolution |
0.001µm |
| Absolute
height accuracy |
±0.3µm/10mm |
| Height
reproducibility |
σ=0.01µmˆÈ“à |
| Height
measuring range |
10mm(~100mm) |
| Minimum
X,Y resolution |
0.02µm
Absolute X,Y accuracy: ±(1.5+4L/1000)µm
X,Y measuring range: 150~150mm and up |
| Control
software |
Windows NT 4.0 |
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Measuring Functions
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3D shape measurement, cross-sectional shape measurement,
roughness measurement, automatic measurement, various
measuring functions |
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| Range
of measurement |
X,Y,Z)=150X150X10mm
Optional: Z=110mm |
| Measurement
resolution |
(X,Y,Z)=0.01X0.01X0.001µm |
| Applications
of measurement |
- Aspherical lens measurement, shape evaluation
- Mold
measurement, roughness measurement
- Microlens
measurement, pitch measurement
- LCD light
guid plate shape and pitch
- Wafer pattern
dimensional measurement
- Measurement of
surface scratches and defects
- MEMS related
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