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 MITAKA
/ RYOKOSHA |
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This equipment has
made complete non-contact, high precision, automatic
measurement of shape, dimensions and surface roughness
possible with a laser probe system. It provides
multi-measurement functionality for a wide range
of uses from R&D to quality control of the
manufacturing line for photonic devices, semiconductor
products, ultra-precision machining parts, etc.
for which the market will demand smaller products
with higher precision and lower costs. |
|
Features |
- Four years after first being sold,
the NH-3, which has become a byword for non-contact
height measurement, has evolved into the new
NH-3N, implementing feedback on the functions
of the high
precision NH-3 SP.
- Experience the world of ultimate
non-contact measurement which features auto
focus functionality
that is not affected by low reflectivity
and completely non-destructive measurement, at
the same time pushing
the edge of precision for Z, X and Y measurements.
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Specifications / Measuring Functions |
Specifications
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| Minimum
height resolution |
0.01µm |
| Absolute
height accuracy |
±1µm/10mm |
| Height
reproducibility |
σ=0.03µm or less |
| Height
measuring range |
10mm(~100mm) |
| Minimum
X,Y resolution |
0.1µm
Absolute X,Y accuracy: ±(1+5L/150)µm
X,Y measuring range: 150~150mm` |
| Control
software |
Windows NT 4.0 |
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Measuring Functions
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3D shape measurement, cross-sectional shape measurement,
roughness measurement, automatic measurement, various
measuring functions |
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